The Orientation and Grain Texture Effect on Life Time Reliability of Sol–Gel Derived PbZr 0.52 Ti 0.48 O 3 Films

We fabricated Pb(Zr,Ti)O 3 (PZT) films with different orientations and grain textures by the sol–gel method. The fabricated films were tested using the high accelerated lifetime testing system. As a result, films with coarse grain texture exhibited longer lifetimes and a higher acceleration factor than those with fine-grained texture. The film orientation did not affect the mean time to failure of the film. This suggests that breaking phenomena are strongly dependent on the number of grain boundaries.