Indium--Tin Oxide/Al Reflective Electrodes for Ultraviolet Light-Emitting Diodes

We investigated indium--tin oxide (ITO)/Al reflective electrodes for improving the light extraction efficiency of UV light-emitting diodes (LEDs). The ITO layer showed high transparency in the UV region upon optimization of the thickness and annealing temperature. As a result, the ITO/Al electrode e...

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Veröffentlicht in:Japanese Journal of Applied Physics 2012-04, Vol.51 (4), p.042101-042101-4
Hauptverfasser: Takehara, Kosuke, Takeda, Kenichiro, Ito, Shun, Aoshima, Hiroki, Iwaya, Motoaki, Takeuchi, Tetsuya, Kamiyama, Satoshi, Akasaki, Isamu, Amano, Hiroshi
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Sprache:eng
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Zusammenfassung:We investigated indium--tin oxide (ITO)/Al reflective electrodes for improving the light extraction efficiency of UV light-emitting diodes (LEDs). The ITO layer showed high transparency in the UV region upon optimization of the thickness and annealing temperature. As a result, the ITO/Al electrode exhibited both high reflectivity in the UV region and good contact characteristics simultaneously. Using this electrode, we succeeded in improving the light output power of a 350 nm UV-A LED.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.51.042101