Fabrication of MgAl 2 O 4 Thin Films on Ferromagnetic Heusler Alloy Fe 2 CrSi by Reactive Magnetron Sputtering
Epitaxial MgAl 2 O 4 thin films were grown on Heusler alloy Fe 2 CrSi by reactive magnetron sputtering of a MgAl 2 target in an O 2 +Ar atmosphere. To grow MgAl 2 O 4 on Fe 2 CrSi, we inserted a protective layer of MgAl 2 between Fe 2 CrSi and MgAl 2 O 4 to prevent Fe 2 CrSi from being oxidized. Gro...
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Veröffentlicht in: | Japanese Journal of Applied Physics 2012-02, Vol.51 (2S), p.2 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Epitaxial MgAl
2
O
4
thin films were grown on Heusler alloy Fe
2
CrSi by reactive magnetron sputtering of a MgAl
2
target in an O
2
+Ar atmosphere. To grow MgAl
2
O
4
on Fe
2
CrSi, we inserted a protective layer of MgAl
2
between Fe
2
CrSi and MgAl
2
O
4
to prevent Fe
2
CrSi from being oxidized. Growth of MgAl
2
O
4
was found to be very sensitive to the MgAl
2
thickness and
P
O2
during deposition of MgAl
2
O
4
. A strong XRD peak of MgAl
2
O
4
(004) was observed with an ultrathin (0.2 nm) MgAl
2
layer. The saturation magnetic moment of Fe
2
CrSi was measured to be 370 emu/cm
3
(1.84 µ
B
/f.u.) at room temperature and it is expected to have a high spin polarization. The Fe
2
CrSi/MgAl
2
O
4
heterostructure is promising for use in future spintronic devices. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.51.02BM04 |