Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma

Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma

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Veröffentlicht in:Japanese Journal of Applied Physics 2009-08, Vol.48 (8), p.8
Hauptverfasser: Kogoshi, Sumio, Yoshioka, Yu, Katayama, Noboru, Kudo, Yusuke
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container_issue 8
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container_title Japanese Journal of Applied Physics
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creator Kogoshi, Sumio
Yoshioka, Yu
Katayama, Noboru
Kudo, Yusuke
description
doi_str_mv 10.1143/JJAP.48.08HB01
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma
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