Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump

Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump

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Veröffentlicht in:Japanese Journal of Applied Physics 2008-11, Vol.47 (11R), p.8615
Hauptverfasser: Tanaka, Katsuhiko, Dau, Van Thanh, Sakamoto, Ryohei, Dinh, Thien Xuan, Dao, Dzung Viet, Sugiyama, Susumu
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container_issue 11R
container_start_page 8615
container_title Japanese Journal of Applied Physics
container_volume 47
creator Tanaka, Katsuhiko
Dau, Van Thanh
Sakamoto, Ryohei
Dinh, Thien Xuan
Dao, Dzung Viet
Sugiyama, Susumu
description
doi_str_mv 10.1143/JJAP.47.8615
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title Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump
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