Characterization of Al-Based Insulating Films Fabricated by Physical Vapor Deposition
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Veröffentlicht in: | Japanese Journal of Applied Physics 2008-01, Vol.47 (1S), p.609 |
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container_issue | 1S |
container_start_page | 609 |
container_title | Japanese Journal of Applied Physics |
container_volume | 47 |
creator | Nakakuki, Masahide Shiono, Akihiro Kobayashi, Isao Tajima, Noriaki Yamakami, Tomohiko Hayashibe, Rinpei Abe, Katsuya Kamimura, Kiichi Obata, Motoki Miyamoto, Mitsunori |
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doi_str_mv | 10.1143/JJAP.47.609 |
format | Article |
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language | eng |
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source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
title | Characterization of Al-Based Insulating Films Fabricated by Physical Vapor Deposition |
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