Thermal Agglomeration of Ultrathin Silicon-on-Insulator Layers: Crystalline Orientation Dependence

Thermal Agglomeration of Ultrathin Silicon-on-Insulator Layers: Crystalline Orientation Dependence

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Veröffentlicht in:Japanese Journal of Applied Physics 2008-03, Vol.47 (3R), p.1461
Hauptverfasser: Fan, Youjun, Nuryadi, Ratno, Burhanudin, Zainal A., Tabe, Michiharu
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container_title Japanese Journal of Applied Physics
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creator Fan, Youjun
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Burhanudin, Zainal A.
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title Thermal Agglomeration of Ultrathin Silicon-on-Insulator Layers: Crystalline Orientation Dependence
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