Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork

Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork

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Veröffentlicht in:Japanese Journal of Applied Physics 2006-05, Vol.45 (5S), p.4631
Hauptverfasser: Ohtsuka, Takahiro, Inoue, Takahiro, Yoshimatsu, Masahiro, Matsudo, Hideryo, Uehara, Hiroshi, Okazaki, Masanobu
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container_end_page
container_issue 5S
container_start_page 4631
container_title Japanese Journal of Applied Physics
container_volume 45
creator Ohtsuka, Takahiro
Inoue, Takahiro
Yoshimatsu, Masahiro
Matsudo, Hideryo
Uehara, Hiroshi
Okazaki, Masanobu
description
doi_str_mv 10.1143/JJAP.45.4631
format Article
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ispartof Japanese Journal of Applied Physics, 2006-05, Vol.45 (5S), p.4631
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork
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