Giant and Stable Conductivity Switching Behaviors in ZrO 2 Films Deposited by Pulsed Laser Depositions
ZrO 2 films have been deposited on Pt/Ti/SiO 2 /Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 10 6 and switching endurance of 10 5 times are observed in a typical Pt/ZrO 2 /Pt structure. The Pt/ZrO 2 /Pt structure exh...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2005-02, Vol.44 (2L), p.L345 |
|---|---|
| Hauptverfasser: | , , , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | ZrO
2
films have been deposited on Pt/Ti/SiO
2
/Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 10
6
and switching endurance of 10
5
times are observed in a typical Pt/ZrO
2
/Pt structure. The Pt/ZrO
2
/Pt structure exhibits two ohmic behaviors in the low-voltage region (
V
< 1.4 V) depending on the value of previously applied voltage and Schottky-type conduction in the high-voltage region (1.4 V<
V |
|---|---|
| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.1143/JJAP.44.L345 |