Real-Time Observation of Fractional-Order X-ray Reflection Profiles of InP(001) During Step-Flow Growth
Fractional-order X-ray reflection profiles of (2×1)-InP(001) have been observed for the first time during step-flow growth of metalorganic chemical vapor deposition. Changes of the profiles have revealed that the coverage of (2 ×1) structures during the growth depends on the flow rates of indium and...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2005-01, Vol.44 (1L), p.L144 |
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| Hauptverfasser: | , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Fractional-order X-ray reflection profiles of (2×1)-InP(001) have been observed for the first time during step-flow growth of metalorganic chemical vapor deposition. Changes of the profiles have revealed that the coverage of (2 ×1) structures during the growth depends on the flow rates of indium and phosphorus sources. After stopping the growth, a slow recovery of peak intensity was observed with a time constant of lager than 1 min which corresponds to the residence time of indium atoms on the surface. |
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| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.1143/JJAP.44.L144 |