Irradiation Damage in SiO 2 /Si System Induced by Photons and/or Ions in Photo-Oxidation and Plasma-Oxidation

Irradiation Damage in SiO 2 /Si System Induced by Photons and/or Ions in Photo-Oxidation and Plasma-Oxidation

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Veröffentlicht in:Japanese Journal of Applied Physics 2004-12, Vol.43 (12), p.8002-8006
Hauptverfasser: Okamoto, Tetsuya, Ide, Tetsuya, Sasaki, Atsushi, Azuma, Kazufumi, Nakata, Yukihiko
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container_title Japanese Journal of Applied Physics
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creator Okamoto, Tetsuya
Ide, Tetsuya
Sasaki, Atsushi
Azuma, Kazufumi
Nakata, Yukihiko
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doi_str_mv 10.1143/JJAP.43.8002
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title Irradiation Damage in SiO 2 /Si System Induced by Photons and/or Ions in Photo-Oxidation and Plasma-Oxidation
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