Observation of Adsorption Phenomena of Dibutyl Phthalate Molecules on Si Surface Using Quartz Crystal Microbalance Method

The adsorption phenomena of dibutyl phthalate (DBP) molecules on the Si surface were observed in detail using a highly sensitive quartz crystal microbalance (QCM) and a new method involving a sliding chamber system. As a result of the precise observation of the adsorption phenomena and an accurate decomposition analysis, the typical Langmuir adsorption phenomenon with a time constant of 350 s was observed following the rapid adsorption phenomenon that occurs within the first 10 s and the next adsorption phenomenon of increasing linearly. After almost reaching the adsorption equilibrium amount, another Langmuir adsorption phenomena for a time constant of 3000 s was also observed; the Langmuir adsorption phenomenon for a time constant of 350 s seems to be that of an isolated admolecule whereas that for 3000 s seems to be one where admolecule cohere by mutual migration on a surface.