Liquid Immersion Deep-UV Optical Disc Mastering for Blu-ray Disc Read-Only Memory

The liquid immersion mastering technique has been successfully applied to the mastering of read-only memory (ROM) discs for the Blu-ray disc (BD) system. Replicated discs with a density corresponding to 25 GB in a single layer on a 12 cm disc showed a bottom jitter of less than 5%. Results concerning process latitude and disc uniformity are presented. A full-format 25 GB ROM disc containing over 2 h of high-definition video content has been mastered according to the BD target specification. The results obtained for a reduced channel bit length show the potential of liquid immersion mastering for densities beyond 31 GB per layer.