New FM Detection Techniques for Scanning Probe Microscopy

New FM demodulation techniques capable of detecting the fast frequency deviation of a cantilever of a noncontact atomic force microscope are proposed and their features were demonstrated by experiments. The techniques entail the frequency conversion of an input FM signal to a pair of zero-Hz-centere...

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Veröffentlicht in:Japanese Journal of Applied Physics 2004-07, Vol.43 (7S), p.4566
Hauptverfasser: Kobayashi, Dai, Kawai, Shigeki, Kawakatsu, Hideki
Format: Artikel
Sprache:eng
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Zusammenfassung:New FM demodulation techniques capable of detecting the fast frequency deviation of a cantilever of a noncontact atomic force microscope are proposed and their features were demonstrated by experiments. The techniques entail the frequency conversion of an input FM signal to a pair of zero-Hz-centered signals with a mutual phase difference of 90 deg, differentiation or Hilbert transformation, multiplication and subtraction. Since the center frequency and scale factor are determined by different processes, a high sensitivity, a fast response and a precise center frequency are achievable at the same time. The developed circuitry is capable of detecting a minimum frequency shift of 0.1 Hz. The maximum response bandwidth is 100 kHz.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.43.4566