Compositional Dependence of Electrical Properties of Highly (100)-/(001)-Oriented Pb(Zr,Ti)O 3 Thick Films Prepared on Si Substrates by Metalorganic Chemical Vapor Deposition

Compositional Dependence of Electrical Properties of Highly (100)-/(001)-Oriented Pb(Zr,Ti)O 3 Thick Films Prepared on Si Substrates by Metalorganic Chemical Vapor Deposition

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Veröffentlicht in:Japanese Journal of Applied Physics 2003-09, Vol.42 (Part 1, No. 9B), p.5922-5926
Hauptverfasser: Yokoyama, Shintaro, Honda, Yoshihisa, Morioka, Hitoshi, Asano, Gouji, Oikawa, Takahiro, Iijima, Takashi, Matsuda, Hirofumi, Funakubo, Hiroshi
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container_end_page 5926
container_issue Part 1, No. 9B
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container_title Japanese Journal of Applied Physics
container_volume 42
creator Yokoyama, Shintaro
Honda, Yoshihisa
Morioka, Hitoshi
Asano, Gouji
Oikawa, Takahiro
Iijima, Takashi
Matsuda, Hirofumi
Funakubo, Hiroshi
description
doi_str_mv 10.1143/JJAP.42.5922
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title Compositional Dependence of Electrical Properties of Highly (100)-/(001)-Oriented Pb(Zr,Ti)O 3 Thick Films Prepared on Si Substrates by Metalorganic Chemical Vapor Deposition
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