Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source

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Veröffentlicht in:	Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 8), p.5408-5414
Hauptverfasser:	Tada, Shigekazu, Ito, Masafumi, Hamagaki, Manabu, Hori, Masaru, Goto, Toshio
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Sprache:	eng
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
title	Deposition of Diamond-Like Carbon Using Compact Electron-Beam-Excited Plasma Source
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