Super-Resolution by Combination of a Solid Immersion Lens and an Aperture

A solid immersion lens is combined with various aperture shapes in order to improve resolution. Both metallic and dielectric apertures are investigated, and optimum shapes for each are determined. Fabrication techniques for each type of combination probe are discussed and implemented, and a simple experiment with a dielectric combination probe scanning a reflective grating demonstrates improved resolution compared to a solid immersion lens alone.