A Laser Thomson Scattering System for Low Density Glow Discharge Plasmas

A Laser Thomson Scattering System for Low Density Glow Discharge Plasmas

A laser Thomson scattering system was constructed to measure the electron properties of capacitively-coupled radio-frequency glow discharges. The system was designed for the detection of the very small Thomson signal against a large background of Rayleigh scattered light. Measurement of electron den...

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Veröffentlicht in:Japanese Journal of Applied Physics 2001, Vol.40 (3R), p.1465
Hauptverfasser: ElSabbagh, Mansour A. Mansour, Koyama, Hiroki, Bowden, Mark D., Uchino, Kiichiro, Muraoka, Katsunori
Format: Artikel
Sprache:eng
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Zusammenfassung:A laser Thomson scattering system was constructed to measure the electron properties of capacitively-coupled radio-frequency glow discharges. The system was designed for the detection of the very small Thomson signal against a large background of Rayleigh scattered light. Measurement of electron density of 10 15 m -3 order was achieved.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.40.1465