Partial Recovery of Photodegradation at Room Temperature in Hydrogenated Amorphous Silicon

Detailed ESR measurements disclosed that neutral Si dangling bonds (DBs) created by light soaking (LS) disappear partially at room temperature in a few hours after LS. In contrast metastable DBs created by thermal quenching remain unchanged at room temperature. It is suggested that a part of the Si...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2001, Vol.40 (3R), p.1244, Article 1244
Hauptverfasser:	Shimizu, Tatsuo, Maehara, Takanori, Mitani, Masahiro, Kumeda, Minoru
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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