Structural Analysis of 6H–SiC(0001)√3×√3 Reconstructed Surface

Using coaxial impact-collision ion scattering spectroscopy (CAICISS), the structure of the 6H–SiC(0001)√3×√3 reconstructed surface was investigated. As a result of composition analysis, the topmost layer of this surface was found to be covered with Si adatoms. Moreover, from the incidence angle dependence of the scattering intensity due to C atoms, it was found that the √3×√3 periodicity was formed by a one-third monolayer of Si adatoms occupying T 4 sites, and the height of the Si adatoms from the first substrate layer was determined to be 1.5±0.2 Å.