Development of Lead Zirconate Titanate Family Thick Films on Various Substrates

We propose a POS (Piezo on Silicon) actuator, which comprise piezoelectric materials on a silicon substrate, and the actuation mechanism uses a bending vibration of a unimorph structure. Realization of this device was attempted, and the low-temperature sintering of piezoelectric ceramics, optimizati...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1999-09, Vol.38 (9S), p.5524
Hauptverfasser:	Akiyama, Yoshikazu, Yamanaka, Kunihiro, Fujisawa, Etsuko, Kowata, Yasutaro
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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