Thickness Dependence of Material Properties of Epitaxial Pb(Zr x Ti 1-x )O 3 Films on Ir/(100) (ZrO 2 ) 1-x (Y 2 O 3 ) x /(100)Si Structures

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Veröffentlicht in:Japanese Journal of Applied Physics 1999-09, Vol.38 (9S), p.5378
Hauptverfasser: Sadayoshi Horii, Sadayoshi Horii, Seiji Yokoyama, Seiji Yokoyama, Hideki Nakajima, Hideki Nakajima, Susumu Horita, Susumu Horita
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container_issue 9S
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container_title Japanese Journal of Applied Physics
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creator Sadayoshi Horii, Sadayoshi Horii
Seiji Yokoyama, Seiji Yokoyama
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description
doi_str_mv 10.1143/JJAP.38.5378
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title Thickness Dependence of Material Properties of Epitaxial Pb(Zr x Ti 1-x )O 3 Films on Ir/(100) (ZrO 2 ) 1-x (Y 2 O 3 ) x /(100)Si Structures
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