Coulomb Blockade Effects in a Highly Doped Silicon Quantum Wire Fabricated on Novel Molecular Beam Epitaxy Grown Material
Coulomb blockade effects are studied in highly doped molecular-beam-epitaxy grown silicon quantum wires. The nanometer structure of the single electron tunneling transistor (SETT) is fabricated by electron beam lithography (EBL), anisotropic reactive ion etching (RIE) and low temperature oxide depos...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1999-01, Vol.38 (1S), p.465 |
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Hauptverfasser: | , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Coulomb blockade effects are studied in highly doped molecular-beam-epitaxy grown silicon
quantum wires. The nanometer structure of the single electron tunneling transistor (SETT) is
fabricated by electron beam lithography (EBL), anisotropic reactive ion etching (RIE) and low
temperature oxide deposition. An extended Coulomb blockade is observed even at
T
=130 K in the
I
-
V
characteristics, while outside the blockade region a clear Coulomb staircase is visible. The
zero-conductivity range is significantly affected by the applied gate voltage. In addition, oscillations
of the Coulomb blockade with gate potential are observed. The nature of tunnel barriers present in
this wire is discussed. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.38.465 |