Transmission X-Ray Microscopy with 50 nm Resolution Installed at Ritsumeikan Synchrotron Radiation Center
A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new type of condenser zone plate (diameter 9 mm, zone number 41,890, outermost zone width 53.7 nm) in the microscope, 50 nm resolution has...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1999-01, Vol.38 (1R), p.274 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new type of condenser zone plate (diameter 9 mm, zone number 41,890, outermost zone width 53.7 nm) in the microscope, 50 nm resolution has been obtained from both knife edge test and star test pattern at a wavelength of 3.2 nm, and for diatoms, the 0.1 µm inner structures have been clearly resolved. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.38.274 |