Transmission X-Ray Microscopy with 50 nm Resolution Installed at Ritsumeikan Synchrotron Radiation Center

A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new type of condenser zone plate (diameter 9 mm, zone number 41,890, outermost zone width 53.7 nm) in the microscope, 50 nm resolution has...

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Veröffentlicht in:Japanese Journal of Applied Physics 1999-01, Vol.38 (1R), p.274
Hauptverfasser: P. Kern, Atsuhiko Hirai, Yasuyuki Nakayama, Yasuyuki Nakayama, Hiroshi Kihara, Hiroshi Kihara
Format: Artikel
Sprache:eng
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Zusammenfassung:A transmission X-ray microscope having two zone plates has been developed at BL-12, Ritsumeikan Synchrotron Radiation Center (Rits SR Center). By incorporating a new type of condenser zone plate (diameter 9 mm, zone number 41,890, outermost zone width 53.7 nm) in the microscope, 50 nm resolution has been obtained from both knife edge test and star test pattern at a wavelength of 3.2 nm, and for diatoms, the 0.1 µm inner structures have been clearly resolved.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.38.274