Large Crystals on Cu Film Surfaces Irradiated by a Glow Discharge Plasma

Large studded crystals grown rapidly with spiral grooves on Cu film surfaces were observed using a scanning electron microscope after irradiation of a glow discharge plasma. Adsorption on and penetration into the Cu film of ions and neutral gases produced in the glow discharge plasma were confirmed by qualitative analysis using a scanning Auger spectrometer. The mechanism of crystal growth was clarified by considering adsorption and penetration of ions such as N 2 + , O 2 + , CO + and O 2 - , and by considering the movement of Cu + ions inside the Cu film, under the influence of local electric fields between positive ions and electrons and between positive and negative ions.