A Multilayer-Coated Reflection Mirror for Microfabrication

We propose a multilayer-coated mirror for the first mirror of a beamline. Calculated reflectivities of over 80% for B 4 C/W and C/Ni constant d-spacing multilayer-coated mirrors are obtained at 6 keV. Moreover, by using the constant d-spacing multilayer-coated mirror, a monochromatic light source with high reflectivity and high resolution is obtained at the glancing angle of 1.5°. Furthermore, it is determined that a graded d-spacing multilayer-coated mirror, i.e., a supermirror, is effective in this photon energy region since the half-width at half-maximum of the reflectivity increases. A multilayer-coated reflection mirror for beamline optics is promising for applications in microfabrication and structure analysis of materials.