Monitoring of Electron Energy Distribution Change from Optical Emission for Nonmagnetic Ultrahigh-Frequency Plasma

Fractional electron density, which is partial electron density in energy distribution, has been measured in a high-density non-magnetic ultrahigh-frequency (UHF) plasma from optical emission of rare gases (Xe, Ar, He). The technique was applied to rare gas mixed plasma, as well as fluorocarbon gas c...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1998-04, Vol.37 (4S), p.2400
Hauptverfasser:	Kinoshita, Keizo, Noda, Shuichi, Okigawa, Mitsuru, Hikosaka, Yukinobu, Itabashi, Naoshi, Inoue, Masami
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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