Development of Piezoelectric Accelerometer of Charge-Shear Type Having Temperature-Independent Sensitivity

A piezoelectric accelerometer based on detecting piezoelectric charge Q 1 caused by shear strain S 5 has been developed, which consists of two piezoelectric elements made from a ferroelectric ceramic and one condenser element also made from a ferroelectric ceramic. Positive temperature dependence of dielectric constant of the former piezoelectric element (PbZr 0.51 Ti 0.49 O 3 modified with 0.7 mol% Nb 2 O 5 ) is compensated by negative dependence of the latter condenser element [Pb 0.8 La 0.2 (Zr 0.4 Ti 0.6 ) 0.95 O 3 or Pb 0.7 Sr 0.2 La 0.1 (Zr 0.5 Ti 0.5 ) 0.975 O 3 ] over a range of -50 to 300°C, with the result that sensitivity and its deviation are obtained to be 42×10 -12 C/G and within 5%, respectively.