New realization method of three-dimensional photonic crystal in optical wavelength region

New realization method of three-dimensional photonic crystal in optical wavelength region

Summary form only given. An important issue for photonic crystals is how to realize 3D photonic crystals in the optical wavelength region. In this paper, we propose a new method by utilizing a wafer-bonding technique combined with a microfabrication technique.

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Veröffentlicht in:Japanese Journal of Applied Physics 1996, Vol.35 (7B), p.388-L912
Hauptverfasser: Noda, S., Yamamoto, N., Sasaki, A.
Format: Artikel
Sprache:eng
Schlagworte:
Dry etching
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gallium arsenide
Laser beams
Optical materials
Optical refraction
Optical variables control
Optics
Photonic band gap
Photonic bandgap materials
Photonic crystals
Physics
Stacking
Substrates
Wafer bonding
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Beschreibung
Zusammenfassung:Summary form only given. An important issue for photonic crystals is how to realize 3D photonic crystals in the optical wavelength region. In this paper, we propose a new method by utilizing a wafer-bonding technique combined with a microfabrication technique.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.35.L909