Unstable region of solid composition in ternary nitride alloys grown by metalorganic vapor-phase epitaxy

A chemical equilibrium model is applied to analyze the growth of AlGaN, InGaN and InAlN alloys using metalorganic vapor-phase epitaxy (MOVPE). The vapor-solid distribution relationship and the phase diagram for deposition are calculated. It is shown that unstable regions of solid composition exist i...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1996-12, Vol.35 (12B), p.L1638-L1640
Hauptverfasser:	KOUKITU, A, SEKI, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Equations of state, phase equilibria, and phase transitions Exact sciences and technology Physics Solid-solid transitions Specific phase transitions
Online-Zugang:	Volltext
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