Unstable region of solid composition in ternary nitride alloys grown by metalorganic vapor-phase epitaxy

A chemical equilibrium model is applied to analyze the growth of AlGaN, InGaN and InAlN alloys using metalorganic vapor-phase epitaxy (MOVPE). The vapor-solid distribution relationship and the phase diagram for deposition are calculated. It is shown that unstable regions of solid composition exist i...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Japanese Journal of Applied Physics 1996-12, Vol.35 (12B), p.L1638-L1640
Hauptverfasser:	KOUKITU, A, SEKI, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Equations of state, phase equilibria, and phase transitions Exact sciences and technology Physics Solid-solid transitions Specific phase transitions
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A chemical equilibrium model is applied to analyze the growth of AlGaN, InGaN and InAlN alloys using metalorganic vapor-phase epitaxy (MOVPE). The vapor-solid distribution relationship and the phase diagram for deposition are calculated. It is shown that unstable regions of solid composition exist in InGaN and InAlN alloys. The origin of the unstable region is also discussed.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.35.L1638