Unstable region of solid composition in ternary nitride alloys grown by metalorganic vapor-phase epitaxy

Unstable region of solid composition in ternary nitride alloys grown by metalorganic vapor-phase epitaxy

A chemical equilibrium model is applied to analyze the growth of AlGaN, InGaN and InAlN alloys using metalorganic vapor-phase epitaxy (MOVPE). The vapor-solid distribution relationship and the phase diagram for deposition are calculated. It is shown that unstable regions of solid composition exist i...

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Veröffentlicht in:Japanese Journal of Applied Physics 1996-12, Vol.35 (12B), p.L1638-L1640
Hauptverfasser: KOUKITU, A, SEKI, H
Format: Artikel
Sprache:eng
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Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Physics
Solid-solid transitions
Specific phase transitions
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container_end_page L1640
container_issue 12B
container_start_page L1638
container_title Japanese Journal of Applied Physics
container_volume 35
creator KOUKITU, A
SEKI, H
description A chemical equilibrium model is applied to analyze the growth of AlGaN, InGaN and InAlN alloys using metalorganic vapor-phase epitaxy (MOVPE). The vapor-solid distribution relationship and the phase diagram for deposition are calculated. It is shown that unstable regions of solid composition exist in InGaN and InAlN alloys. The origin of the unstable region is also discussed.
doi_str_mv 10.1143/JJAP.35.L1638
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1347-4065
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects Condensed matter: structure, mechanical and thermal properties
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Physics
Solid-solid transitions
Specific phase transitions
title Unstable region of solid composition in ternary nitride alloys grown by metalorganic vapor-phase epitaxy
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