Estimation of Inductance for High-T c dc-SQUID's in Coplanar Waveguide

We have investigated the electrical properties of high- T c dc-SQUID's formed in a coplanar waveguide, and discussed their applicability to single flux quantum (SFQ) circuits. The planar type Josephson junctions were fabricated in NdBa 2 Cu 3 O y (NBCO) superconducting thin films by a narrow-focused ion beam (FIB) irradiation technique. The critical current and normal resistance values of the Josephson junction at 4.2 K were 115 µA and 8 Ω, respectively. The inductance was estimated by applying a direct injection of the control current into the dc-SQUID loop and measuring the periodic voltage response. A loop inductance of 47 pH was obtained for a 25 µm-wide and 20 µm-long dc-SQUID at 4.2 K. It has been clarified that for a stable operation of SFQ logic circuits, a 10 µm-square dc-SQUID's are required.