Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium
Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are fo...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 1996-11, Vol.35 (11A), p.L1459, Article L1459 |
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| container_issue | 11A |
| container_start_page | L1459 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 35 |
| creator | CHOI, Y. W BOWDEN, M MURAOKA, K |
| description | Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant. |
| doi_str_mv | 10.1143/JJAP.35.L1459 |
| format | Article |
| fullrecord | <record><control><sourceid>pascalfrancis_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_35_L1459</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2499591</sourcerecordid><originalsourceid>FETCH-LOGICAL-c412t-c5fb3af780c9ec7a00baf716b5448d7251598d43e4426cd0f76a40211966b4fe3</originalsourceid><addsrcrecordid>eNp1kD1PwzAQhi0EEqUwsntgTfHH2anHqlBKqQTiY44ujk2N0qTY6dB_T0oRAxLT6dU99-r0EHLJ2YhzkNeLxeRpJNVoyUGZIzLgEvIMmFbHZMCY4BkYIU7JWUoffdQK-IA8TBqsdykk2nr6snLYreht7WwXg6Wz4Ooq0dBQpM9YhTabRfe5dY3d0ZuQ7Arju9uv564O2_U5OfFYJ3fxM4fkbXb7Op1ny8e7--lkmVngosus8qVEn4-ZNc7myFjZJ65LBTCucqG4MuMKpAMQ2lbM5xqhf58brUvwTg5Jdui1sU0pOl9sYlhj3BWcFXsTxd5EIVXxbaLnrw78BpPF2kdsbEi_RwKMUYb3mPxTa0OHXWibLmKo_yn_AmzFbd4</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>CHOI, Y. W ; BOWDEN, M ; MURAOKA, K</creator><creatorcontrib>CHOI, Y. W ; BOWDEN, M ; MURAOKA, K</creatorcontrib><description>Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.35.L1459</identifier><identifier>CODEN: JJAPA5</identifier><language>eng</language><publisher>Tokyo: Japanese journal of applied physics</publisher><subject>Electric discharges ; Exact sciences and technology ; Glow; corona ; Physics ; Physics of gases, plasmas and electric discharges ; Physics of plasmas and electric discharges</subject><ispartof>Japanese Journal of Applied Physics, 1996-11, Vol.35 (11A), p.L1459, Article L1459</ispartof><rights>1997 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c412t-c5fb3af780c9ec7a00baf716b5448d7251598d43e4426cd0f76a40211966b4fe3</citedby><cites>FETCH-LOGICAL-c412t-c5fb3af780c9ec7a00baf716b5448d7251598d43e4426cd0f76a40211966b4fe3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=2499591$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>CHOI, Y. W</creatorcontrib><creatorcontrib>BOWDEN, M</creatorcontrib><creatorcontrib>MURAOKA, K</creatorcontrib><title>Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium</title><title>Japanese Journal of Applied Physics</title><description>Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant.</description><subject>Electric discharges</subject><subject>Exact sciences and technology</subject><subject>Glow; corona</subject><subject>Physics</subject><subject>Physics of gases, plasmas and electric discharges</subject><subject>Physics of plasmas and electric discharges</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1996</creationdate><recordtype>article</recordtype><recordid>eNp1kD1PwzAQhi0EEqUwsntgTfHH2anHqlBKqQTiY44ujk2N0qTY6dB_T0oRAxLT6dU99-r0EHLJ2YhzkNeLxeRpJNVoyUGZIzLgEvIMmFbHZMCY4BkYIU7JWUoffdQK-IA8TBqsdykk2nr6snLYreht7WwXg6Wz4Ooq0dBQpM9YhTabRfe5dY3d0ZuQ7Arju9uv564O2_U5OfFYJ3fxM4fkbXb7Op1ny8e7--lkmVngosus8qVEn4-ZNc7myFjZJ65LBTCucqG4MuMKpAMQ2lbM5xqhf58brUvwTg5Jdui1sU0pOl9sYlhj3BWcFXsTxd5EIVXxbaLnrw78BpPF2kdsbEi_RwKMUYb3mPxTa0OHXWibLmKo_yn_AmzFbd4</recordid><startdate>19961101</startdate><enddate>19961101</enddate><creator>CHOI, Y. W</creator><creator>BOWDEN, M</creator><creator>MURAOKA, K</creator><general>Japanese journal of applied physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19961101</creationdate><title>Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium</title><author>CHOI, Y. W ; BOWDEN, M ; MURAOKA, K</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c412t-c5fb3af780c9ec7a00baf716b5448d7251598d43e4426cd0f76a40211966b4fe3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1996</creationdate><topic>Electric discharges</topic><topic>Exact sciences and technology</topic><topic>Glow; corona</topic><topic>Physics</topic><topic>Physics of gases, plasmas and electric discharges</topic><topic>Physics of plasmas and electric discharges</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>CHOI, Y. W</creatorcontrib><creatorcontrib>BOWDEN, M</creatorcontrib><creatorcontrib>MURAOKA, K</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>CHOI, Y. W</au><au>BOWDEN, M</au><au>MURAOKA, K</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>1996-11-01</date><risdate>1996</risdate><volume>35</volume><issue>11A</issue><spage>L1459</spage><pages>L1459-</pages><artnum>L1459</artnum><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPA5</coden><abstract>Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant.</abstract><cop>Tokyo</cop><pub>Japanese journal of applied physics</pub><doi>10.1143/JJAP.35.L1459</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 1996-11, Vol.35 (11A), p.L1459, Article L1459 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_crossref_primary_10_1143_JJAP_35_L1459 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Electric discharges Exact sciences and technology Glow corona Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges |
| title | Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-27T10%3A29%3A09IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Analysis%20of%20Sheath%20Electric%20Fields%20in%20a%20Radio-Frequency%20Discharge%20in%20Helium&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=CHOI,%20Y.%20W&rft.date=1996-11-01&rft.volume=35&rft.issue=11A&rft.spage=L1459&rft.pages=L1459-&rft.artnum=L1459&rft.issn=0021-4922&rft.eissn=1347-4065&rft.coden=JJAPA5&rft_id=info:doi/10.1143/JJAP.35.L1459&rft_dat=%3Cpascalfrancis_cross%3E2499591%3C/pascalfrancis_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |