Analysis of Sheath Electric Fields in a Radio-Frequency Discharge in Helium

Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are fo...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1996-11, Vol.35 (11A), p.L1459, Article L1459
Hauptverfasser:	CHOI, Y. W, BOWDEN, M, MURAOKA, K
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology Glow corona Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. Electric field distributions and sheath widths were determined for discharges operated at pressures in the range of 0.2–1.6 Torr. The experimental results are found to be predicted well by a theory in which collisions in the sheath are dominant.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.35.L1459