Impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP by dielectric thin cap films and characterization of its in-plane spatial resolution
We have studied impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP, induced by three different dielectric cap films, namely, SiO 2 , SiN x and SrF 2 . The difference in photoluminescence characteristics of these materials after heat treatment has been discussed. Furthermore, the in-pl...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1996, Vol.35 (2B), p.1276-1279 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | We have studied impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP, induced by three different dielectric cap films, namely, SiO
2
, SiN
x
and SrF
2
. The difference in photoluminescence characteristics of these materials after heat treatment has been discussed. Furthermore, the in-plane spatial resolution of the disordering process has been investigated for the first time. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.35.1276 |