Impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP by dielectric thin cap films and characterization of its in-plane spatial resolution

We have studied impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP, induced by three different dielectric cap films, namely, SiO 2 , SiN x and SrF 2 . The difference in photoluminescence characteristics of these materials after heat treatment has been discussed. Furthermore, the in-pl...

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Veröffentlicht in:Japanese Journal of Applied Physics 1996, Vol.35 (2B), p.1276-1279
Hauptverfasser: SUDO, S, ONISHI, H, NAKANO, Y, SHIMOGAKI, Y, TADA, K, MONDRY, M. J, COLDREN, L. A
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Sprache:eng
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Zusammenfassung:We have studied impurity-free disordering of InGaAs/InGaAlAs quantum wells on InP, induced by three different dielectric cap films, namely, SiO 2 , SiN x and SrF 2 . The difference in photoluminescence characteristics of these materials after heat treatment has been discussed. Furthermore, the in-plane spatial resolution of the disordering process has been investigated for the first time.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.35.1276