Simple Method of Correcting Optical Proximity Effect for 0.35 µm Logic LSI Circuits

We propose a practical optical proximity correction (OPC) system, whose characteristics are simple and effective, for logic LSI circuits and outline all the steps for OPC. We also report the improvement of gate length deviations in a logic device with OPC.

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Bibliographische Detailangaben
Veröffentlicht in:	Japanese Journal of Applied Physics 1995-12, Vol.34 (12S), p.6547
Hauptverfasser:	Kawamura, Eiichi, Haruki, Tamae, Manabe, Yasuo, Isamu Hanyu, Isamu Hanyu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We propose a practical optical proximity correction (OPC) system, whose characteristics are simple and effective, for logic LSI circuits and outline all the steps for OPC. We also report the improvement of gate length deviations in a logic device with OPC.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.34.6547