Liquid metal ion sources : normalization of virtual source size and angular ion intensity

Normalization of liquid metal ion source (LMIS) features such as angular ion intensity and virtual source size has been proposed. The derived form for the normalized angular ion intensity is verified by the experimental data for Ga, Ga–In, Ga–In–Sn, and Cs LMISs.

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Veröffentlicht in:Japanese Journal of Applied Physics 1994, Vol.33 (3B), p.479-481
Hauptverfasser: ISHITANI, T, UMEMURA, K, KAWANAMI, Y
Format: Artikel
Sprache:eng
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Zusammenfassung:Normalization of liquid metal ion source (LMIS) features such as angular ion intensity and virtual source size has been proposed. The derived form for the normalized angular ion intensity is verified by the experimental data for Ga, Ga–In, Ga–In–Sn, and Cs LMISs.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.33.l479