Liquid metal ion sources : normalization of virtual source size and angular ion intensity
Normalization of liquid metal ion source (LMIS) features such as angular ion intensity and virtual source size has been proposed. The derived form for the normalized angular ion intensity is verified by the experimental data for Ga, Ga–In, Ga–In–Sn, and Cs LMISs.
Gespeichert in:
Veröffentlicht in: | Japanese Journal of Applied Physics 1994, Vol.33 (3B), p.479-481 |
---|---|
Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Normalization of liquid metal ion source (LMIS) features such as angular ion intensity and virtual source size has been proposed. The derived form for the normalized angular ion intensity is verified by the experimental data for Ga, Ga–In, Ga–In–Sn, and Cs LMISs. |
---|---|
ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.33.l479 |