Preparation of Pb(Zr,Ti)O 3 Thin Films by Sol-Gel Technique

In the preparation of P b ( Z r , T i ) O 3 thin films by the sol-gel technique, the following procedures are involved: evaporation of solvents, thermal decomposition of organometallic compounds and crystallization. In this study, a thermodynamic approach was employed for the sol-gel technique, and the processing conditions were determined. For the processes of evaporation and thermal decomposition, the processing conditions were determined by applying Ozawa's method [Bull. Chem. Soc. Jpn. 38 (1965) 1881]. By means of both the X-ray diffraction technique and scanning electron microscope technique, crystal structure and surface morphology were evaluated. It was observed that the perovskite phase began to form at 500° C and was completed at 600° C. Moreover, a dense Pb(Zr,Ti)O 3 thin film was also formed by annealing at 700° C for 120 min.