Simultaneous measurements of energetic O- ions and O atoms in sputtering of zinc oxide target

Energetic negative ions and neutral atoms were observed simultaneously using a time-of-flight apparatus for conventional planar magnetron sputtering of a ZnO:Al target in Ar and O 2 gases. Energetic ions such as O - and O 2 - and energetic neutral O atoms were detected in time-of-flight spectra. The gas pressure dependence of signal intensities of the spectra were measured, and the behavior of the energetic particles was examined. The ratio of the secondary electron emission coefficients of O - ions and O atoms at the collector was estimated from the results, and the relative intensities of the fluxes of O - and O were estimated. The scattering mechanism of energetic O - ions with Ar gas and O 2 gas is discussed.