Shear horizontal acoustic plate mode viscosity sensor
Mode analysis of a LiTaO 3 (LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs)...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1993-05, Vol.32 (5B), p.2392-2395 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Mode analysis of a LiTaO
3
(LTO) plate has been carried out numerically, and an interference-free shear horizontal acoustic plate mode (SH-APM) suitable for measuring the liquid viscosity was found. A viscosity sensor having a liquid container on the side opposite to interdigital transducers (IDTs) was fabricated on
X
-cut 148°
Y
-prop LTO. Satisfactory agreement was obtained between the calculated frequency spectrum and the experimental one. A loading test was carried out for a series of Newtonian liquids, which showed good agreement with the perturbation theory. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.32.2392 |