High-temperature scanning tunneling microscopy observation of a (15, 17, 1) facet structure on a Si(110) surface

High-temperature scanning tunneling microscopy (HTSTM) was applied to observe a facet structure on a Si(110) surface. The facet structures of (15, 17, 1) and (17, 15, 1) and the 16-structure were observed at 655°C. The 16-structure was formed on flat parts. It was confirmed that the 16-structure and...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1993-04, Vol.32 (4), p.1808-1809
Hauptverfasser:	YAMAMOTO, Y, SUEYOSHI, T, SATO, T, IWATSUKI, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface structure and topography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Beschreibung
Zusammenfassung:	High-temperature scanning tunneling microscopy (HTSTM) was applied to observe a facet structure on a Si(110) surface. The facet structures of (15, 17, 1) and (17, 15, 1) and the 16-structure were observed at 655°C. The 16-structure was formed on flat parts. It was confirmed that the 16-structure and the facet structures of (15, 17, 1) and (17, 15, 1) coexisted on the surface on which hillocks are dispersed. The hillock may be a contamination.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/jjap.32.1808