Application of a Hall accelerator to diamondlike carbon film coatings
A Hall accelerator-type ion source for low-voltage continuous operation (hereafter called HALOC) without any exhaustible filaments, designed for film coating purposes, has successfully produced a large-area low-energy continuous beam of methane or oxygen. The thin film of carbon uniformly coated on...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 1992-06, Vol.31 (6A), p.1845-1854 |
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| container_end_page | 1854 |
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| container_issue | 6A |
| container_start_page | 1845 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 31 |
| creator | OKADA, M TOKU, H YAMAMOTO, Y YOSHIKAWA, K |
| description | A Hall accelerator-type ion source for low-voltage continuous operation (hereafter called HALOC) without any exhaustible filaments, designed for film coating purposes, has successfully produced a large-area low-energy continuous beam of methane or oxygen. The thin film of carbon uniformly coated on a steel plate by the HALOC has been found to be a typical amorphous hard carbon film with high Vickers hardness, strong adhesion, and strong anticorrosion properties. The causes of strong adhesion of the film have been studied. |
| doi_str_mv | 10.1143/jjap.31.1845 |
| format | Article |
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The thin film of carbon uniformly coated on a steel plate by the HALOC has been found to be a typical amorphous hard carbon film with high Vickers hardness, strong adhesion, and strong anticorrosion properties. 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| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 1992-06, Vol.31 (6A), p.1845-1854 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_crossref_primary_10_1143_JJAP_31_1845 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Physics |
| title | Application of a Hall accelerator to diamondlike carbon film coatings |
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