Application of a Hall accelerator to diamondlike carbon film coatings

A Hall accelerator-type ion source for low-voltage continuous operation (hereafter called HALOC) without any exhaustible filaments, designed for film coating purposes, has successfully produced a large-area low-energy continuous beam of methane or oxygen. The thin film of carbon uniformly coated on a steel plate by the HALOC has been found to be a typical amorphous hard carbon film with high Vickers hardness, strong adhesion, and strong anticorrosion properties. The causes of strong adhesion of the film have been studied.