Spatial control of electron energy distribution function in a magnetically filtered multicusp plasma source

Using a movable magnetic filter, a technique to control plasma parameters spatially has been investigated in a multicusp plasma source. At any filter position, plasma parameters change steeply across the magnetic filter. Mainly, a multicusp plasma source is divided into two parts, i.e., a source plasma region with energetic electrons and a diffused plasma region. In the latter region, the high-energy component of electrons is eliminated thoroughly by the localized magnetic field of the filter.