Epitaxial Growth of Sr x TiO y and Fabrication of EuBa 2 Cu 3 O 7-δ /Sr x TiO y /Pb Tunnel Junctions
Thin films deposited from a SrTiO 3 (STO) target using rf magnetron sputtering were examined. The Sr 1.6 TiO y films with perovskitelike structure grew epitaxially at substrate temperatures above 500°C. The trilayered films of EuBa 2 Cu 3 O 7 (EBCO)/STO/EBCO were deposited eptaxially on STO(110) sub...
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Veröffentlicht in: | Japanese Journal of Applied Physics 1991-03, Vol.30 (3R), p.466 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Thin films deposited from a SrTiO
3
(STO) target using rf magnetron sputtering were examined. The Sr
1.6
TiO
y
films with perovskitelike structure grew epitaxially at substrate temperatures above 500°C. The trilayered films of EuBa
2
Cu
3
O
7
(EBCO)/STO/EBCO were deposited eptaxially on STO(110) substrates, but partial polycrystal growth in the EBCO film of the third layer was observed. In view of this result, EBCO(110)/STO(110)/Pb tunnel junctions were produced on STO(110) substrates. The
I-V
characteristics of junctions with an
R
nn
of 10 Ω showed a gap opening at a bias voltage of about 10 mV, a clear gap structure at 2.5 mV and
R
j
/
R
nn
=12.4 below 2.5 mV. The low-energy gap below 2.5 mV was caused by the deterioration of the EBCO base electrodes due to the junction fabrication process. The large
R
j
/
R
nn
suggests that an STO epitaxial ultrathin film can be a good low-leakage barrier. On the other hand, lower resistance junctions showed the development of a supercurrent at zero bias. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.30.466 |