Application of modern control theory to temperature control of the MBE system

A molecular beam epitaxy control system, whereby one microprocessor manages all the objects, has been constructed. The model-following algorithm, which is one of the applications of modern control theory, has been adopted instead of the conventional PID algorithm in order to improve the dynamic response of the temperature. It has been confirmed by computer simulation and measurement that the model-following algorithm is significantly effective especially when the set temperature is to be changed as a function of time. An application of the model-following algorithm to device fabrication has also been demonstrated.