Update on the compact synchrotron X-ray source helios

Helios is a compact superconducting Synchrotron X-ray source designed specifically for lithography. It will produce a total X-ray power of 8.2 kW when the design stored beam of 200 mA is achieved. The first phase of commissioning has just been completed in less than 2 months. A stored beam of 305 mA...

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Veröffentlicht in:	Japanese Journal of Applied Physics 1990-11, Vol.29 (11), p.2620-2624
Hauptverfasser:	WILSON, M. N, SMITH, A. I. C, KEMPSON, V. C, PURVIS, A. L, ANDERSON, R. J, TOWNSEND, M. C, JORDEN, A. R, ANDREWS, D. E, SULLER, V. P, POOLE, M. W
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Helios is a compact superconducting Synchrotron X-ray source designed specifically for lithography. It will produce a total X-ray power of 8.2 kW when the design stored beam of 200 mA is achieved. The first phase of commissioning has just been completed in less than 2 months. A stored beam of 305 mA has been accumulated at the injection energy of 200 MeV and 55 mA has been accelerated to the full energy of 700 MeV.
ISSN:	0021-4922 1347-4065
DOI:	10.1143/jjap.29.2620