One Approach to Joining Plasma and Sheath

One Approach to Joining Plasma and Sheath

This letter treats the problem of joining plasma and sheath transverse to the discharge axis. The balance equations of plasma are solved from the center of the plasma to the wall. The point joining plasma and sheath is decided so that the sheath equation becomes non-negative. It is thought that the...

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Veröffentlicht in:Japanese Journal of Applied Physics 1989-12, Vol.28 (12), p.L2261-L2264, Article L2261
Hauptverfasser: KUBOTA, T, OHSAWA, A, YAMADA, S, OHUCHI, M, KANEDA, T
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Electronics
Exact sciences and technology
Miscellaneous
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Beschreibung
Zusammenfassung:This letter treats the problem of joining plasma and sheath transverse to the discharge axis. The balance equations of plasma are solved from the center of the plasma to the wall. The point joining plasma and sheath is decided so that the sheath equation becomes non-negative. It is thought that the results of this letter will be useful in the analysis of the probe diagnostics, plasma processing, etc.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.28.L2261