Resistivity correction factor for the four-probe method: experiment I
Experimental verification of the theoretically derived resistivity correction factor (RCF) is presented. Resistivity and sheet resistance measurements by the four-probe method are made on three samples: isotropic graphite, ITO film and Au film. It is indicated that the RCF can correct the apparent v...
Gespeichert in:
Veröffentlicht in: | Japanese Journal of Applied Physics 1988-05, Vol.27 (5), p.869-870 |
---|---|
Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Experimental verification of the theoretically derived resistivity correction factor (RCF) is presented. Resistivity and sheet resistance measurements by the four-probe method are made on three samples: isotropic graphite, ITO film and Au film. It is indicated that the RCF can correct the apparent variations of experimental data to yield reasonable resistivities and sheet resistances. |
---|---|
ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.27.869 |